So what was your favorite moments in Episode III: Revenge of the Sith
I'd have to say the entire ending (last 30 minutes or so).

The entire film (except for those few love scenes

).
All conversations between Palpatine and Anakin and of course the last 45 minutes or so.
Order 66, it was the most powerful scene in the movie (if not the entire saga).
1. the entire end with anakin/obi-wan fighting on mustafar
2. yoda force pushing the imperial guards over when he enters palpatine's office... priceless
3. obi-wan and yoda battling the clones when they enter the jedi temple